DC/RF Magnetron Sputtering System
Make: Excel Instruments·Model: Custom 4-gun·Year installed: 2023
About this instrument
DC/RF Magnetron Sputtering System (Excel Instruments Custom 4-gun) hosted at the central instrumentation facility of SCTIMST Thiruvananthapuram, Thiruvananthapuram. Typical applications include thin-film deposition, metal and oxide coatings (PVD), multilayer device films, electrode and contact deposition. Available to academia and industry through I-STEM with trained operator support.
Typical applications
- thin-film deposition
- metal and oxide coatings (PVD)
- multilayer device films
- electrode and contact deposition
Specifications
- Targets
- 4 × 2-inch confocal
- Base vacuum
- 5×10⁻⁸ Torr
- Substrate
- Heating to 800 °C, rotation
Tariff
| Academic / Industry | per hour |
|---|---|
| Academic | ₹1,250 |
| Industry | ₹6,250 |
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