DC/RF Magnetron Sputtering System
Make: Excel Instruments·Model: Custom 4-gun·Year installed: 2024
About this instrument
DC/RF Magnetron Sputtering System (Excel Instruments Custom 4-gun) hosted at the central instrumentation facility of Tata Institute of Fundamental Research, Mumbai. Typical applications include thin-film deposition, metal and oxide coatings (PVD), multilayer device films, electrode and contact deposition. Available to academia and industry through I-STEM with trained operator support.
Typical applications
- thin-film deposition
- metal and oxide coatings (PVD)
- multilayer device films
- electrode and contact deposition
Specifications
- Targets
- 4 × 2-inch confocal
- Base vacuum
- 5×10⁻⁸ Torr
- Substrate
- Heating to 800 °C, rotation
Tariff
| Academic / Industry | per hour |
|---|---|
| Academic | ₹1,000 |
| Industry | ₹5,000 |
Similar equipment nearby
Alternatives with the same technique or in the same discipline.
DC/RF Magnetron Sputtering System
CSIR-IICT
Hyderabad, Telangana
Academic
₹700 /hour
DC/RF Magnetron Sputtering System
NIT Karnataka Surathkal
Mangaluru, Karnataka
Academic
₹1,100 /hour
DC/RF Magnetron Sputtering System
NIT Karnataka Surathkal
Mangaluru, Karnataka
Academic
₹1,500 /hour
DC/RF Magnetron Sputtering System
Indian Institute of Science
Bengaluru, Karnataka
Academic
₹1,200 /hour
DC/RF Magnetron Sputtering System
NIT Tiruchirappalli
Tiruchirappalli, Tamil Nadu
Academic
₹1,150 /hour
DC/RF Magnetron Sputtering System
AIIMS New Delhi
New Delhi, Delhi
Academic
₹1,150 /hour