DC/RF Magnetron Sputtering System
Make: AJA·Model: Orion 8·Year installed: 2025
About this instrument
DC/RF Magnetron Sputtering System (AJA Orion 8) hosted at the central instrumentation facility of ICAR-IARI New Delhi, New Delhi. Typical applications include thin-film deposition, metal and oxide coatings (PVD), multilayer device films, electrode and contact deposition. Available to academia and industry through I-STEM with trained operator support.
Typical applications
- thin-film deposition
- metal and oxide coatings (PVD)
- multilayer device films
- electrode and contact deposition
Specifications
- Targets
- 4 × 2-inch confocal
- Base vacuum
- 5×10⁻⁸ Torr
- Substrate
- Heating to 800 °C, rotation
Tariff
| Academic / Industry | per hour |
|---|---|
| Academic | ₹1,150 |
| Industry | ₹5,750 |
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